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Fabrication, Operation and Flow Visualization in Surface-acoustic-wave-driven Acoustic-counterflow Microfluidics
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Analysis on Characteristics of ZnO Surface Acoustic Wave with and without Micro-Structures

Huei-Yu Huang1,2, Hsi-Jen Chiang1,2, Ching-Zong Wu2,3,4

  • 1Department of Dentistry, Taipei Medical University-Shuang Ho Hospital, New Taipei City 235, Taiwan.

Micromachines
|July 3, 2019
PubMed

Keywords:
ZnO thin filmsignal responsesilicon micromachiningsurface acoustic wave

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