Determination of Dimension and Conformal Arsenic Doping Profile of a Fin Field Effect Transistors by Time-of-Flight

Won Ja Min1, Jwasoon Kim1, Kyungsu Park1

  • 1MEIS Development Team , Korea Materials and Analysis Corporation , Techno 8-ro 33 , Yuseng-gu , Daejon 305-500 , Republic of Korea.

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