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    Lead zirconate titanate (PZT)-based piezoelectric micromachined ultrasonic transducers (PMUTs) enable precise manipulation of microparticles. These PMUTs demonstrate effective particle trapping and pattern generation using acoustic waves, offering new possibilities in microparticle control.

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    Area of Science:

    • Materials Science
    • Acoustics
    • Microfluidics

    Background:

    • Piezoelectric micromachined ultrasonic transducers (PMUTs) are increasingly utilized for microscale applications.
    • Particle manipulation using acoustic waves offers a contactless method for controlling microparticles.

    Purpose of the Study:

    • To design, fabricate, and characterize PZT-based PMUTs for particle manipulation.
    • To demonstrate the capability of PMUTs for trapping and controlling microparticles using acoustophoresis.

    Main Methods:

    • Fabrication of PMUTs with a 60 µm diaphragm diameter and ~8 MHz resonant frequency.
    • Testing PMUT performance in water, measuring acoustic pressure output (9.5 kPa at 7.5 mm).
    • Demonstration of particle trapping and manipulation of 4 µm silica beads using 5 Vpp unipolar excitation.

    Main Results:

    • Successful trapping and deterministic control of multiple silica beads via acoustophoresis without microfluidic flow.
    • Particle movement towards high-pressure areas on the diaphragm, consistent with simulations.
    • Generation of unique bead patterns and particle levitation planes at frequencies up to 60 MHz, significantly beyond the operational bandwidth.

    Conclusions:

    • PZT-based PMUTs are effective for contactless microparticle manipulation.
    • Acoustic manipulation using PMUTs allows for precise pattern generation and levitation.
    • The demonstrated capabilities open avenues for advanced microparticle handling in various scientific and technological fields.