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Updated: Jan 22, 2026

Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor
Published on: August 30, 2012
KLu(WO4)2/SiO2 Tapered Waveguide Platform for Sensing Applications
Marc Medina1, Christian E Rüter2, Maria Cinta Pujol3
1Física i Cristal·lografia de Materials i Nanomaterials (FiCMA-FiCNA-EMaS), Departament de Química Física i Inorganica (DQFI), Universitat Rovira i Virgili (URV), Campus Sescelades, C/Marcel·lí Domingo 1, E-43007 Tarragona, Spain.
Abstract:
This paper provides a generic way to fabricate a high-index contrast tapered waveguide platform based on dielectric crystal bonded on glass for sensing applications. As a specific example, KLu(WO4)2 crystal on a glass platform is made by means of a three-technique combination. The methodology used is on-chip bonding, taper cutting with an ultra-precise dicing saw machine and inductively coupled plasma-reactive ion etching (ICP-RIE) as a post-processing step. The high quality tapered waveguides obtained show low surface roughness (25 nm at the top of the taper region), exhibiting propagation losses estimated to be about 3 dB/cm at 3.5 m wavelength. A proof-of-concept with crystal-on-glass tapered waveguides was realized and used for chemical sensing.
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