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Related Experiment Video

Updated: Jan 22, 2026

Measurement of Total Calcium in Neurons by Electron Probe X-ray Microanalysis
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Electron Probe Microanalysis Through Coated Oxidized Surfaces.

Mike B Matthews1,2, Ben Buse2, Stuart L Kearns2

  • 1AWE, Aldermaston, Reading, RG7 4PR, UK.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|July 17, 2019
PubMed
Summary
This summary is machine-generated.

This study introduces a new method for electron probe microanalysis (EPMA) of metals with surface oxides and conductive coatings. The technique accurately determines oxide and coating thicknesses, improving elemental analysis of layered materials.

Keywords:
EPMAcoatingoxidethin film

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Surface Science

Background:

  • Surface oxides complicate low voltage electron probe microanalysis (EPMA) of metals.
  • Conductive coatings create a three-layer structure, further complicating analysis.
  • Accurate characterization of these layers is crucial for reliable elemental quantification.

Purpose of the Study:

  • To develop a method for determining coating and oxide thicknesses in EPMA.
  • To enable accurate determination of substrate intensities in layered samples.
  • To improve the reliability of EPMA for oxidized metal surfaces with conductive coatings.

Main Methods:

  • Parameterizing X-ray intensities using linear functions of coating (tc) and oxide (to) thicknesses.
  • Determining tc independently from the coating element k-ratio.
  • Deriving to from the Oxygen (O) k-ratio and determined tc.
  • Calculating intensity components from oxide and substrate layers.

Main Results:

  • Modeled results for Ag on Bi2O3 on Bi system show the method's applicability.
  • Experimental validation with Ag- or C-coated oxidized Bi samples confirms consistency.
  • Determined oxide thicknesses before and after coating were consistent.
  • Predicted Bi Mα k-ratios closely matched experimental EPMA measurements.

Conclusions:

  • The presented method effectively determines coating and oxide thicknesses in EPMA.
  • It allows for accurate quantification of elemental intensities from layered structures.
  • This approach enhances the capability of EPMA for analyzing oxidized metal surfaces.