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Updated: Jan 22, 2026

Cryo-electron Microscopy Specimen Preparation By Means Of a Focused Ion Beam
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Focused Electron Beam-Induced Deposition and Post-Growth Purification Using the Heteroleptic Ru Complex

Jakub Jurczyk1,2, Christopher R Brewer3, Olivia M Hawkins3

  • 1Laboratory for Mechanics of Materials and Nanostructures , Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39 , CH-3602 Thun , Switzerland.

ACS Applied Materials & Interfaces
|July 17, 2019
PubMed

Keywords:
focused electron beam induced depositionmask repairpost-growth purificationprecursor compoundsruthenium

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