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Updated: Aug 7, 2026
In Situ SIMS and IR Spectroscopy of Well-defined Surfaces Prepared by Soft Landing of Mass-selected Ions
Published on: June 16, 2014
Focused electron beam-induced deposition from Ru(CO)₄(fumaronitrile): incomplete carbonyl loss and nitrogen retention
Chinmai Sai Jureddy1, Atul Chaudhary2, Rashmi Singh2
1Empa - Swiss Federal Laboratories for Materials Science and Technology, 3603 Thun, Switzerland.
Abstract:
The additive manufacturing of metal nanostructures using direct-write focused electron beam-induced deposition (FEBID) requires exploration and development of new metal-coordinated precursor complexes. In this study, we introduce (η 2-fumaronitrile)(tetracarbonyl)ruthenium(0), a novel FEBID precursor designed using a mechanism-based approach in which the ligand set consists of neutral two-electron donor ligands weakly bound to the metal centre atom. Nanostructures were fabricated using this precursor via FEBID, and their elemental composition was determined through energy-dispersive X-ray spectroscopy. The resulting deposits consistently exhibited a metal content in the range of 8-12 at.%, highlighting the need for a deeper understanding of the role of competing mechanisms preventing detached neutral ligands from desorption during the FEBID process.
Graphical Abstract:
Fate of (η 2-fumaronitrile)(tetracarbonyl)ruthenium in the focused electron-beam induced deposits.
Supplementary Information:
The online version contains supplementary material available at 10.1140/epjd/s10053-026-01225-9.
