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Ligand Co-Deposition in Focused Electron Beam Induced Nanoprinting: A Predictive Composition Model
Jakub Jurczyk1,2,3, Leo Brockhuis2, Amalio Fernández-Pacheco1
1Institute of Applied Physics, TU Wien, Vienna, Austria.
Small Methods
|December 22, 2025
Summary
Focused Electron Beam Induced Deposition (FEBID) 3D nanoprinting models now predict material composition by including detached ligand behavior. This advancement enables precise control over nanostructure properties for advanced nanotechnology applications.
Area of Science:
- Nanotechnology
- Materials Science
- Surface Chemistry
Background:
- Nanotechnology demands 3D nanostructures with controlled material composition.
- Focused Electron Beam Induced Deposition (FEBID) is a high-resolution 3D nanoprinting technique.
- Current FEBID modeling predicts shape and growth but not material composition.
Purpose of the Study:
- Expand FEBID modeling to include surface kinetics of detached ligands.
- Predict trends in nanoprinted material composition.
- Define optimal nanoprint process windows.
Main Methods:
- Developed an expanded continuum model for FEBID.
- Incorporated dissociation and desorption kinetics of detached ligands.
- Validated the model experimentally with chromium and silver precursors.
Main Results:
- The model successfully predicts trends in metallic composition.
- Established process windows based on electron exposure time and flux.
- Calculated values show good agreement with literature data for various precursors.
Conclusions:
- The enhanced FEBID model provides a versatile framework for predictive material nano-printing.
- Understanding ligand surface kinetics is crucial for controlling nanoprint composition.
- This work advances the design of experiments for tailored nanostructure fabrication.

