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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Nanobridges formed through electron beam image reversal lithography for plasmonic mid-infrared resonators with high

Landobasa Y M Tobing1, Aaron D Mueller1, Jinchao Tong1

  • 1School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue 639798, Singapore.

Nanotechnology
|July 18, 2019
PubMed

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