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Updated: Jan 22, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Optical nonlinearities in ultra-silicon-rich nitride characterized using z-scan measurements
Byoung-Uk Sohn1, Ju Won Choi1, Doris K T Ng2
1Photonics Devices and System Group, Engineering Product Development, Singapore University of Technology and Design, 487372, Singapore, Singapore.
Abstract:
The dispersive nonlinear refractive index of ultra-silicon-rich nitride, and its two-photon and three-photon absorption coefficients are measured in the wavelength range between 0.8 µm-1.6 µm, covering the O- to L - telecommunications bands. In the two-photon absorption range, the measured nonlinear coefficients are compared to theoretically calculated values with a simple parabolic band structure. Two-photon absorption is observed to exist only at wavelengths lower than 1.2 μm. The criterion for all-optical switching through the material is investigated and it is shown that ultra-silicon-rich nitride is a good material in the three-photon absorption region, which spans the entire O- to L- telecommunications bands.
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