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Polymer-Assisted Deposition of Gallium Oxide for Thin-Film Transistor Applications

Lin Chen1, Wangying Xu1, Wenjun Liu1

  • 1College of Materials Science and Engineering, Guangdong Research Center for Interfacial Engineering of Functional Materials, Shenzhen Key Laboratory of Special Functional Materials , Shenzhen University , Shenzhen 518060 , China.

ACS Applied Materials & Interfaces
|July 24, 2019
PubMed

Keywords:
GaOannealing temperaturedielectricpolymer-assisted depositionthin-film transistors

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