Energy Loss in a MEMS Disk Resonator Gyroscope

Area of Science:

• Physics
• Mechanical Engineering
• Electrical Engineering

Background:

• High performance disk resonator gyroscopes (DRGs) require analysis and minimization of energy loss.
• Primary energy loss mechanisms in microelectromechanical system (MEMS) resonators include thermoelastic damping, anchor loss, and electronic damping.

Purpose of the Study:

• To calculate and analyze the thermoelastic damping, anchor loss, and electronic damping in a specific DRG design.
• To identify the dominant energy loss mechanisms and their impact on the gyroscope's quality factor (Q).

Main Methods:

• Combined finite element analysis and theoretical derivation were used to calculate damping mechanisms.
• Experimental fabrication and testing of the DRG were performed to measure the quality factor (Q) under varying bias voltages.

Main Results:

• Thermoelastic damping was identified as the dominant energy loss mechanism, accounting for over 90% of dissipated energy.
• Anchor loss was found to be negligible due to the symmetrical structure.
• Electronic damping contributed 2.6%-9.6% to energy loss as bias voltage increased from 10 V to 20 V, significantly affecting the quality factor (Q).
• Measured maximum Q values ranged from 141k to 132k with varying bias voltage.

Conclusions:

• Thermoelastic damping and electronic damping are the primary factors determining the quality factor (Q) of the DRG.
• Optimizing the resonance structure to reduce thermoelastic damping and refining the testing circuit to minimize electronic damping are crucial for enhancing DRG performance.