Towards Low Cost and Low Temperature Capacitive CO2 Sensors Based on Amine Functionalized Silica Nanoparticles

Jamila Boudaden1,2, Armin Klumpp3, Hanns-Erik Endres3

  • 1Fraunhofer Research Institution for Microsystems and Solid State Technologies EMFT, Silicon Technologies and Devices, Hansastrasse 27d, 80686 Munich, Germany. Jamila.boudaden@emft.fraunhofer.de.

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