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Contact Photolithography at Sub-Micrometer Scale Using a Soft Photomask

Chun-Ying Wu1, Heng Hsieh1, Yung-Chun Lee2

  • 1Department of Mechanical Engineering, National Cheng Kung University, Tainan 70101, Taiwan.

Micromachines
|August 21, 2019
PubMed

Keywords:
black photoresistcontact photolithographysoft photomasksub-micrometer scaleultraviolet patterning

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