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Related Experiment Video

Updated: Jan 20, 2026

Evaluation of Left Ventricular Structure and Function using 3D Echocardiography
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Transformation of 2D Planes into 3D Soft and Flexible Structures with Embedded Electrical Functionality.

Hyunmin Moon, Namsun Chou1, Hee Won Seo

  • 1Center for BioMicroSystems , Korea Institute of Science and Technology (KIST) , Seoul 02792 , Republic of Korea.

ACS Applied Materials & Interfaces
|August 22, 2019
PubMed
Summary

A new plasma treatment technique enables the creation of flexible, 3D biomedical devices from 2D microelectromechanical system (MEMS) structures. This method allows for selective bonding of polydimethylsiloxane (PDMS) and parylene-C, paving the way for advanced implantable technologies.

Keywords:
MEMSPDMSflexible, soft, 3D structureparylene-Cselective bonding

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Area of Science:

  • Biomaterials Engineering
  • Microfabrication
  • Medical Device Technology

Background:

  • Flexible and soft three-dimensional (3D) structures are crucial for implantable biomedical devices.
  • Current microelectromechanical system (MEMS) fabrication methods face limitations in materials and scale for 3D structures.

Purpose of the Study:

  • To develop a novel technique for fabricating 3D structures from 2D MEMS components using selective bonding.
  • To enable the creation of soft, flexible 3D structures with embedded functionalities for biomedical applications.

Main Methods:

  • Selective bonding of polydimethylsiloxane (PDMS) and parylene-C using plasma treatment.
  • Fabrication of 2D structures via MEMS techniques, followed by inflation of non-bonded patterns to form 3D structures.
  • Mechanical testing and chemical analysis to evaluate bonding strength and mechanism.

Main Results:

  • Successful fabrication of soft and flexible 3D structures with diverse patterns and dimensions.
  • Demonstrated integration of electrical functions, including light-emitting diodes (LEDs) and electrocorticogram (ECoG) electrodes.
  • Characterization of bonding strength and mechanism for PDMS and parylene-C.

Conclusions:

  • The developed selective bonding technique is MEMS-capable, producing flexible and soft 3D structures.
  • These 3D structures hold significant promise for a wide array of biomedical applications.
  • The technique overcomes limitations of traditional MEMS fabrication for complex 3D biomedical devices.