New Heteroleptic Cobalt Precursors for Deposition of Cobalt-Based Thin Films

Seong Ho Han1,2, Sheby Mary George1, Ga Yeon Lee1

  • 1Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea.

ACS Omega
|August 29, 2019
PubMed

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