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Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics
Published on: February 5, 2020
Multi-Channel Signal-Generator ASIC for Acoustic Holograms
A new complementary metal-oxide-semiconductor (CMOS) application-specific integrated circuit (ASIC) generates dynamic phase patterns for acoustic holography. This innovation enables precise control for applications like particle manipulation using ultrasonic transducers.
Area of Science:
- Electrical Engineering
- Acoustic Engineering
- Materials Science
Background:
- Acoustic holography requires precise control over phase patterns.
- Existing methods for generating dynamic phase patterns can be complex and costly.
- Integrated circuits offer a potential solution for compact and efficient phase control.
Purpose of the Study:
- To develop a complementary metal-oxide-semiconductor (CMOS) application-specific integrated circuit (ASIC) for generating arbitrary, dynamic phase patterns.
- To demonstrate the ASIC's capability in acoustic hologram applications.
- To explore the integration of the ASIC with different ultrasonic transducers.
Main Methods:
- Fabrication of a CMOS ASIC with a cascadable 1x9 array of independently controlled signal generators.
- Individual phase control of square wave outputs for each channel.
- Driving a 6x6 air-coupled matrix array ultrasonic transducer and a 2x2 piezoelectric micromachined ultrasonic transducer (PMUT) array with the ASIC.
- Performing acoustic pressure mapping and particle manipulation experiments.
Main Results:
- The fabricated ASIC demonstrated individual phase control for nine output channels with 16 levels of phase resolution.
- The ASIC successfully drove both matrix array and PMUT ultrasonic transducers.
- Acoustic pressure mapping and particle manipulation were achieved, validating the system's functionality.
- The flexibility of the ASIC for integration with various transducers was confirmed.
Conclusions:
- The developed CMOS ASIC effectively generates dynamic phase patterns for acoustic holography.
- The ASIC is suitable for driving different types of ultrasonic transducers, including PMUTs.
- This technology holds potential for advanced acoustic manipulation and integrated ultrasonic systems.
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