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Updated: Jan 19, 2026

Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes
13:49

Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes

Published on: January 19, 2020

7.1K

Numerical simulation research of catenary tip-insulator-metal structure for nano-lithography

Wen-Peng Zhang, Fei Liang, Xi-Yu Long

    Applied Optics
    |September 11, 2019
    PubMed

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