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Updated: Jan 19, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

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Si-rich Si nitride waveguides for optical transmissions and toward wavelength conversion around 2  μm

Manon Lamy, Christophe Finot, Alexandre Parriaux

    Applied Optics
    |September 11, 2019
    PubMed

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