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Related Experiment Video

Updated: Jan 19, 2026

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A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector.

Jianxun Hong1,2, Andrew M Spring3, Feng Qiu1

  • 1Institute for Materials Chemistry and Engineering, Kyushu University, 6-1 Kasuga-koen Kasuga-city, Fukuoka, 816-8580, Japan.

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|September 12, 2019
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Summary

We developed a high-efficiency grating coupler for silicon nitride photonics using a bottom reflector. This device achieves a low insertion loss of -3.5 dB and a wide bandwidth, compatible with CMOS manufacturing.

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Area of Science:

  • Photonics
  • Integrated Optics
  • Materials Science

Background:

  • Silicon nitride (SiN) photonics is crucial for integrated circuits.
  • Efficient fiber-to-chip coupling is a key challenge in SiN photonics.
  • Existing grating couplers often lack high efficiency and broad bandwidth.

Purpose of the Study:

  • To design and demonstrate a high-efficiency apodized grating coupler for SiN photonic integrated circuits.
  • To incorporate a bottom reflector for enhanced performance.
  • To achieve CMOS-compatible fabrication with minimal process steps.

Main Methods:

  • Design of an apodized grating coupler structure.
  • Integration of a multi-layer quarter-wave film bottom reflector (SiN/SiO2).
  • Fabrication using standard CMOS processes with a single etching step.
  • Optical characterization including insertion loss and bandwidth measurement.

Main Results:

  • Achieved a peak coupling efficiency of -1.75 dB (insertion loss of -3.5 dB).
  • Demonstrated a 3 dB wavelength bandwidth of 76.34 nm with a 20-layer reflector.
  • Fabrication is compatible with Complementary Metal-Oxide-Semiconductor (CMOS) processes.
  • The process requires only a single etching step.

Conclusions:

  • The proposed grating coupler offers high efficiency and a wide bandwidth for SiN photonic integrated circuits.
  • The bottom reflector design significantly enhances coupling performance.
  • The CMOS-compatible, single-etch fabrication process is suitable for mass production.