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Updated: Jan 19, 2026

Tuning Oxide Properties by Oxygen Vacancy Control During Growth and Annealing
Published on: June 9, 2023
Surface oxygen vacancy defect engineering of p-CuAlO2via Ar&H2 plasma treatment for enhancing VOCs sensing
Bin Tong1, Gang Meng2, Zanhong Deng2
1Anhui Provincial Key Laboratory of Photonic Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei, 230031, China. menggang@aiofm.ac.cn xdfang@aiofm.ac.cn and University of Science and Technology of China, Hefei 230026, China.
Abstract:
Ar&H2 plasma treatment was proposed to enhance the response of a p-CuAlO2 sensor toward volatile organic compounds. Comprehensive defect characterization studies indicate a substantial increase of surface unsaturated oxygen vacancy (VO) defects via plasma treatment, which could provide active sites for molecule adsorption and the subsequent interfacial redox reaction.
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