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Absolute Depth Measurement Using Multiphase Normalized Cross-Correlation for Precise Optical Profilometry.

Duc-Hieu Duong1, Chin-Sheng Chen2, Liang-Chia Chen3,4

  • 1Graduate Institute of Automation Technology, College of Mechanical & Electrical Engineering, No. 1, Section 3, National Taipei University of Technology, Zhong-Xiao E. Rd, Da'an District, Taipei City 10608, Taiwan. duongduchieu85@gmail.com.

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Summary
This summary is machine-generated.

A new absolute depth measurement algorithm minimizes uncertainty in multifrequency phase-shifting (MFPS) measurements. This method, based on normalized cross-correlation, improves fringe-order calculation accuracy and enhances surface profile reconstruction, even in low signal-to-noise ratio regions.

Keywords:
3D measurementfringe projection profilometrymeasurement uncertaintymultifrequency phase shiftingtemporal phase unwrapping

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Area of Science:

  • Optical Metrology
  • Phase Measurement Techniques

Background:

  • Multifrequency phase-shifting (MFPS) algorithms extend unambiguous phase range but amplify measurement uncertainty.
  • Measurement uncertainty from single-frequency phase maps propagates to final unwrapped phase maps, affecting fringe-order calculations.

Purpose of the Study:

  • To analyze causes of measurement uncertainty in MFPS algorithms.
  • To propose a novel absolute depth measurement algorithm to minimize uncertainty propagation.
  • To improve the accuracy and reliability of absolute depth measurements.

Main Methods:

  • Developed a new absolute depth measurement algorithm based on normalized cross-correlation (NCC).
  • The algorithm aims to minimize incorrect fringe-order calculations within the MFPS framework.
  • Experimental validation of the proposed algorithm for calibrating fringe orders and reconstructing surface profiles.

Main Results:

  • The proposed NCC-based algorithm effectively calibrates incorrect fringe orders in MFPS.
  • Accurate surface profile reconstruction was achieved even in extremely low signal-to-noise ratio (SNR) regions.
  • Measurement precision was confirmed at one standard deviation below 5.4 µm for an absolute distance of 16 mm.
  • Measurement accuracy improved significantly, reducing errors to 0.5% of the measuring range.

Conclusions:

  • The novel algorithm effectively minimizes measurement uncertainty propagation in MFPS.
  • It enhances the accuracy of absolute depth measurements and surface profile reconstruction.
  • The algorithm is applicable to other optical measurement applications, including interferometric distance measurements.