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Updated: Jan 4, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Duc-Hieu Duong1, Chin-Sheng Chen2, Liang-Chia Chen3,4
1Graduate Institute of Automation Technology, College of Mechanical & Electrical Engineering, No. 1, Section 3, National Taipei University of Technology, Zhong-Xiao E. Rd, Da'an District, Taipei City 10608, Taiwan. duongduchieu85@gmail.com.
A new absolute depth measurement algorithm minimizes uncertainty in multifrequency phase-shifting (MFPS) measurements. This method, based on normalized cross-correlation, improves fringe-order calculation accuracy and enhances surface profile reconstruction, even in low signal-to-noise ratio regions.
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