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High-performance Acetone Soluble Tape Transfer Printing Method for Heterogeneous Integration.

Jiaqi Zhang1, Yichang Wu1, Zhe Li1

  • 1State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University, 2 South Taibai Road, Xi'an, 710071, China.

Scientific Reports
|November 2, 2019
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Summary

A novel acetone soluble tape (AST) method enables efficient, high-performance transfer printing for heterogeneous integration. This technique maximizes transfer efficiency onto diverse substrates, including curvilinear surfaces, for advanced device fabrication.

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Semiconductor Manufacturing

Background:

  • Heterogeneous integration is crucial for advanced electronic devices.
  • Existing transfer printing methods face challenges with efficiency and substrate compatibility.
  • Developing new methods is essential for seamless integration of diverse materials.

Purpose of the Study:

  • To introduce a novel acetone soluble tape (AST) method for high-performance transfer printing.
  • To evaluate the efficiency and applicability of the AST method compared to existing techniques.
  • To demonstrate the fabrication of high-quality silicon-based devices using the AST method.

Main Methods:

  • A new soluble tape, dissolvable in acetone, was developed for transfer printing.
  • Silicon (Si) inks were transferred from SOI wafers to various substrates using the AST method.
  • The AST method was compared with thermal release tape (TRT), water soluble tape (WST), and polydimethylsiloxane (PDMS) methods.
  • Silicon thin-film transistors (TFTs) were fabricated on sapphire substrates using AST-transferred Si membranes.

Main Results:

  • The AST method demonstrated high-performance transfer printing without adhesion promoters.
  • It maximized transfer efficiency by avoiding interface contention between stamp/inks and inks/receiver substrate.
  • The method successfully transferred Si inks onto diverse substrates, including curvilinear surfaces.
  • Fabricated Si TFTs exhibited good performance, confirming the quality of transferred Si membranes.

Conclusions:

  • The acetone soluble tape (AST) method is an effective and efficient technique for heterogeneous integration.
  • AST enables versatile substrate selection and high-quality material transfer.
  • This method holds significant potential for advancing semiconductor device fabrication and integration.