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Direct UV written integrated planar waveguides using a 213 nm laser
Optics Express
|November 6, 2019
Summary
Researchers demonstrated integrated waveguides in silica devices using direct UV laser writing. This new method with a 213 nm laser allows faster fabrication of single-mode waveguides with low propagation loss.
Area of Science:
- Photonics and Optical Engineering
- Materials Science
Background:
- Integrated optical devices are crucial for modern communication and sensing.
- Direct UV writing is a technique for fabricating optical waveguides.
- Previous methods often require higher laser fluences and longer fabrication times.
Purpose of the Study:
- To demonstrate the first integrated waveguides in planar silica devices using direct UV writing with a 213 nm laser.
- To characterize the fabricated waveguides in terms of numerical aperture (NA) and mode field diameter (MFD).
- To assess the fabrication speed and propagation loss.
Main Methods:
- Fabrication of silica waveguides using direct UV writing with a 213 nm laser at various fluences.
- Measurement of Numerical Aperture (NA) and Mode Field Diameter (MFD) for each waveguide.
- Cutback measurements to determine propagation loss.
Main Results:
- Single-mode waveguides were achieved at significantly lower fluences compared to 244 nm laser systems, enabling rapid fabrication.
- A maximum in-plane refractive index change of 2.4 × 10-3 was estimated.
- Directly measured propagation loss was 0.42 ± 0.07 dB cm-1, with calculated losses as low as 0.2 ± 0.03 dB/cm.
Conclusions:
- Direct UV writing with a 213 nm laser is an effective method for fabricating integrated waveguides in planar silica.
- The technique offers advantages in fabrication speed and achievable index change.
- The demonstrated low propagation losses indicate suitability for optical device applications.

