Properties of electrostatic correcting systems with annular apertures.

Tetsuji Kodama1, Tadahiro Kawasaki2, Takashi Ikuta3

  • 1Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan.

Summary

Electron microscopes use special apertures to correct spherical aberration, a common lens defect. This study provides analytical formulas for these correcting effects in electron imaging.