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Updated: Jan 4, 2026
Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications
Published on: April 21, 2016
A Silicon Nanowire Array Biosensor Fabricated by Complementary Metal Oxide Semiconductor Technique for Highly
Xun Yang1, Yun Fan1, Zhenhua Wu2
1School of Electronic and Information Engineering, Foshan University, Foshan 528000, China.
Abstract:
In this paper, we present a highly sensitive and selective detection of serum carcinoembryonic antigen (CEA) based on silicon nanowire (SiNW) array device. With the help of traditional microfabrication technology, low-cost and highly controllable SiNW array devices were fabricated. After a series of surface modification processes, SiNW array biosensors show rapid and reliable response to CEA; the detection limit of serum CEA was 10 fg/mL, the current signal is linear with the logarithm of serum CEA concentration in the range of 10 fg/mL to 100 pg/mL. In this work, SiNW array biosensors can obtain strong signal and high signal-to-noise ratio; these advantages can reduce the production cost of the SiNW-based system and promote the application of SiNWs in the field of tumor marker detection.
