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Visual Servo Control System of a Piezoelectric2-Degree-of-Freedom Nano-Stepping Motor

Cheng-Lung Chen1, Shao-Kang Hung1

  • 1Department of Mechanical Engineering, National Chiao Tung University, No. 1001, University Road, Hsinchu 30010, Taiwan.

Micromachines
|November 29, 2019
PubMed

Keywords:
nano-positionerpiezoelectricitystepping motorstick-slipvisual servo control

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