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Functional Metallic Microcomponents via Liquid-Phase Multiphoton Direct Laser Writing: A Review
Erik Hagen Waller1, Stefan Dix1, Jonas Gutsche1,2
1Physics Department and Research Center OPTIMAS, Technische Universität Kaiserslautern, 67663 Kaiserslautern, Germany.
Micromachines
|December 5, 2019
Summary
Direct laser writing now enables fabrication of functional metallic microstructures. This advanced technique is applicable for creating metal components, particularly for microelectromechanical systems (MEMS).
Area of Science:
- Materials Science
- Nanotechnology
- Additive Manufacturing
Background:
- Metallic microstructures are crucial components in microelectromechanical systems (MEMS).
- On-chip fabrication of metallic structures is highly desirable for integrated functionality.
- Previous direct laser writing (DLW) primarily focused on polymeric structures.
Purpose of the Study:
- To review the advancements in direct laser writing for fabricating functional metallic microstructures.
- To highlight the development of novel photosensitive materials for metallic DLW.
- To assess the applicability of DLW for metallic microstructure fabrication.
Main Methods:
- Overview of direct laser writing (DLW) via multiphoton absorption.
- Review of novel photosensitive materials enabling metallic microstructure fabrication (gold, silver).
- Analysis of achieved fabrication results and applicability.
Main Results:
- Demonstration of DLW for fabricating functional metallic microstructures from liquid phase.
- Successful development of photosensitive materials for gold and silver microstructures.
- Metallic microstructure fabrication via DLW has reached a level of practical applicability.
Conclusions:
- Direct laser writing is a viable technology for on-chip fabrication of metallic microstructures.
- Advancements in photosensitive materials have expanded DLW capabilities to metals.
- This technique holds significant potential for applications in MEMS and beyond.
