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Updated: Jan 2, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Thomas Thersleff1, Linus Schönström2,3, Cheuk-Wai Tai2
1Stockholm University, Department of Materials and Environmental Chemistry, 10691, Stockholm, Sweden. thomas.thersleff@mmk.su.se.
This study advances electron magnetic circular dichroism (EMCD) for atomic-resolution magnetic moment measurements in materials. We detail progress in overcoming experimental and data processing challenges for single-pass EMCD, paving the way for new discoveries.
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