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Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors
Yuki Shimizu1, Hiraku Matsukuma1, Wei Gao1
1Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan.
Sensors (Basel, Switzerland)
|December 7, 2019
Summary
This review introduces advanced multi-axis optical sensors for high-precision positioning. These sensors, utilizing grating reflectors, enable precise angle and displacement measurements, overcoming limitations of traditional methods.
Area of Science:
- Dimensional metrology
- Optical sensing technologies
- Precision engineering
Background:
- High-precision positioning requires multi-axis angle and displacement measurement.
- Conventional linear displacement sensors face challenges in multi-axis applications due to Abbe errors and misalignment, increasing measurement uncertainty.
- There is a need for advanced sensing solutions to achieve sub-nanometric resolution in multi-axis measurements.
Purpose of the Study:
- To review state-of-the-art multi-axis optical sensors for dimensional metrology.
- To discuss the application of grating reflectors for single-laser-beam multi-axis measurements.
- To present fabrication and evaluation methods for large-area planar scale gratings.
Main Methods:
- Introduction of three-axis autocollimators and planar encoders.
- Description of six-degree-of-freedom planar encoders utilizing planar scale gratings.
- Explanation of grating reflector employment for simultaneous translational and angular displacement measurement.
- Presentation of fabrication techniques including single-point diamond cutting with fast tool servo and interference lithography.
- Outline of Fizeau interferometer-based evaluation methods for planar scale gratings.
Main Results:
- Multi-axis optical sensors like three-axis autocollimators and planar encoders offer solutions for precision positioning.
- Grating reflectors integrated with a single laser beam facilitate simultaneous measurement of translational and angular displacement.
- Advanced fabrication techniques enable the production of large-area planar scale gratings.
- Fizeau interferometry provides a robust method for evaluating grating performance.
Conclusions:
- State-of-the-art multi-axis optical sensors significantly enhance precision positioning capabilities in dimensional metrology.
- The use of grating reflectors and advanced fabrication methods offers a pathway to overcome traditional measurement uncertainties.
- Further development in these optical sensing technologies is crucial for advancing high-precision applications.
