Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Functional and Network PHAs via Stereoselective Polymerization and Tailored Post-Transformation.

Angewandte Chemie (International ed. in English)·2026
Same author

Comparative Transcriptomic Analysis of Detoxification Enzyme Gene Families in Parent and Offspring Riptortus pedestris After Sublethal Thiamethoxam Treatment.

Insects·2026
Same author

Clinical and pathological characteristics, diagnosis, and surgical treatment of uterine angioleiomyoma: a retrospective cohort study.

Frontiers in medicine·2026
Same author

Positional Isomer of P3HB by Stereoselective Polymerization of Racemic α-Methyl-β-propiolactone Delivers Polyethylene-like Properties.

Journal of the American Chemical Society·2026
Same author

Utilizing clinical features, genetic mutations, and a 14-gene molecular assay for optimizing the management of multiple primary lung cancer.

Translational lung cancer research·2026
Same author

Absorptive resonant mirrors enabling high-Q perfect absorption for refractive index sensing.

Optics letters·2026

Related Experiment Video

Updated: Jan 1, 2026

High-resolution Thermal Micro-imaging Using Europium Chelate Luminescent Coatings
09:01

High-resolution Thermal Micro-imaging Using Europium Chelate Luminescent Coatings

Published on: April 16, 2017

8.0K

Study on a High Performance MEMS Infrared Thermopile Detector.

Aida Bao1,2, Cheng Lei2, Haiyang Mao3

  • 1School of Information technology and electronics, Beijing Institute of Technology, Beijing100081, China.

Micromachines
|December 19, 2019
PubMed
Summary

This study introduces a novel micro-electromechanical systems (MEMS) thermopile infrared detector with enhanced responsivity and a fast response time. The developed MEMS detector shows promise for high-precision temperature and vacuum sensing applications.

Keywords:
MEMSetch-stopinfrared detectorthermopile

More Related Videos

In Situ Surface Temperature Measurement in a Conveyor Belt Furnace via Inline Infrared Thermography
07:03

In Situ Surface Temperature Measurement in a Conveyor Belt Furnace via Inline Infrared Thermography

Published on: May 30, 2020

4.7K
Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors
09:59

Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors

Published on: June 23, 2018

8.1K

Related Experiment Videos

Last Updated: Jan 1, 2026

High-resolution Thermal Micro-imaging Using Europium Chelate Luminescent Coatings
09:01

High-resolution Thermal Micro-imaging Using Europium Chelate Luminescent Coatings

Published on: April 16, 2017

8.0K
In Situ Surface Temperature Measurement in a Conveyor Belt Furnace via Inline Infrared Thermography
07:03

In Situ Surface Temperature Measurement in a Conveyor Belt Furnace via Inline Infrared Thermography

Published on: May 30, 2020

4.7K
Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors
09:59

Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors

Published on: June 23, 2018

8.1K

Area of Science:

  • Sensor Technology
  • Micro-electromechanical Systems (MEMS)
  • Infrared Detection

Background:

  • Traditional infrared detectors face challenges in achieving high responsivity and precise measurements.
  • Micro-electromechanical systems (MEMS) offer miniaturization and enhanced performance for sensor applications.

Purpose of the Study:

  • To present a high-performance MEMS thermopile infrared detector with improved responsivity.
  • To demonstrate the detector's potential for high-precision temperature and vacuum sensing.

Main Methods:

  • Fabrication of a MEMS thermopile infrared detector utilizing a double-end beam and dual-layer thermocouple structure.
  • Integration of an etch-stop structure to prevent etching-related damage.
  • Characterization of detector responsivity and response time.

Main Results:

  • Achieved a responsivity of 1151.14 V/W.
  • Measured a response time of 14.46 ms.
  • Demonstrated the effectiveness of the double-end beam and dual-layer thermocouple design.

Conclusions:

  • The developed MEMS thermopile infrared detector exhibits high performance.
  • The integrated etch-stop structure enhances device reliability.
  • The detector is suitable for high-precision temperature and vacuum sensing.