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Study on a High Performance MEMS Infrared Thermopile Detector
Aida Bao1,2, Cheng Lei2, Haiyang Mao3
1School of Information technology and electronics, Beijing Institute of Technology, Beijing100081, China.
Abstract:
This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into the detector to prevent isotropic etching-caused damage on the device. The responsivity of the detector achieved 1151.14 V/W, and the measured response time was 14.46 ms. The detector had the potential to work as a high-precision temperature sensor and as a vacuum sensor.
