A high-efficiency and high-spectral-resolution EUV/soft X-ray monochromator based on off-plane diffraction

Werner Jark1

  • 1Elettra - Sincrotrone Trieste SCpA, SS 14 - km 163.5 in AREA Science Park, Basovizza, 34149 Trieste, Italy.

Summary

Off-plane diffraction from periodic gratings offers superior efficiency for extreme ultraviolet and soft X-ray spectroscopy. This configuration achieves high spectral resolution comparable to in-plane methods, making it ideal for synchrotron radiation applications.