Related Experiment Video
Updated: Jan 1, 2026
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Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition
Published on: August 29, 2017
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High-performance thin-film optical filters with stress compensation
Summary
We developed high-performance, flat thin-film optical filters using plasma-assisted sputtering. These filters achieve excellent flatness over large diameters, enabling advanced optical applications.
Area of Science:
- Optics and Materials Science
Background:
- High-performance optical filters are crucial for various scientific and industrial applications.
- Achieving high flatness in multi-layer thin-film optical filters presents significant manufacturing challenges due to internal stress.
Purpose of the Study:
- To present a detailed description of high-performance thin-film optical filters exhibiting exceptional flatness.
- To demonstrate a manufacturing method for producing these advanced optical components.
Main Methods:
- Utilizing plasma-assisted reactive magnetron sputtering for multi-layer thin-film deposition.
- Implementing dual-side coatings with tailored spectral functions for effective stress compensation.
Main Results:
- Demonstrated highly reflecting mirrors at 515 nm with peak-to-valley flatness of 15 nm over a 75 mm aperture.
- Successfully fabricated narrow bandpass filters and filters with broadband controlled transmission.
Conclusions:
- The developed method enables the production of high-flatness, multi-layer thin-film optical filters.
- These filters are suitable for demanding optical systems requiring precise spectral and spatial performance.
