L-shaped ITO structures fabricated by oblique angle deposition technique for mid-infrared circular dichroism

This paper proposes a mid-infrared chiral structure, which consists of L-shaped indium tin oxide (ITO) films formed on self-assembled monolayer polystyrene microspheres in two orthogonal directions by oblique angle deposition technique. Experimental results demonstrate that the structure exhibit circular dichroism (CD) responses in the range of 2.5 - 4 µm. As the thickness difference of the ITO films in the two orthogonal directions increases, the CD response enhances. The reason is that the ITO films produce cross dipoles and their bigger differences in thickness bring to bigger phase differences in optical chirality. The experimental results also demonstrate that the CD signals are evidently stronger than those of the structure consisting of silver in the mid-infrared band. This work provides a new idea for the fabrication of mid-infrared chiral structures, which have potential applications in the polarization state control of mid-infrared lasers.