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Probe misalignment calibration in fiber point-diffraction interferometer.

Daodang Wang, Zhongmin Xie, Chao Wang

    Optics Express
    |December 28, 2019
    PubMed
    Summary
    This summary is machine-generated.

    This study presents a high-precision method to calibrate probe misalignment in fiber point-diffraction interferometers (PDI). This calibration is crucial for accurate 3D coordinate and wavefront measurements without imaging lenses.

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    Area of Science:

    • Optical metrology
    • Interferometry
    • Precision engineering

    Background:

    • Fiber point-diffraction interferometers (PDI) measure 3D coordinates and wavefronts.
    • Accurate PDI measurements depend on probe-detector parallelism.
    • Probe misalignment from fabrication errors causes significant measurement inaccuracies.

    Purpose of the Study:

    • To propose and validate a high-precision method for calibrating probe misalignment in fiber PDI.
    • To enable accurate geometric alignment and misalignment calibration in interferometric systems lacking imaging lenses.

    Main Methods:

    • Developed a calibration method involving central positioning via phase difference.
    • Incorporated tilt adjustment using Zernike polynomials fitting.
    • Validated the method through numerical simulations and experimental testing.

    Main Results:

    • Demonstrated the feasibility and accuracy of the proposed probe misalignment calibration technique.
    • The method effectively addresses processing uncertainties in PDI measuring probes.
    • Achieved high-precision geometry alignment and misalignment calibration.

    Conclusions:

    • The proposed method offers a viable solution for probe misalignment calibration in fiber PDI.
    • Enables precise wavefront and 3D coordinate measurements even with probe fabrication errors.
    • Facilitates accurate interferometric testing systems without the need for imaging lenses.