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Updated: Dec 31, 2025

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Large-angle beaming from asymmetric nanoslit-corrugation structures
Peng Li1,2, Khairul Alam2, Henri Partanen2
1School of Optics and Photonics, Beijing Institute of Technology, 100081 Beijing, People's Republic of China.
Abstract:
The beaming effect in single apertures surrounded by periodic corrugations and the manipulation of beaming directions from such structures has gained considerable attention since discovery. Different materials and structural profiles have been studied in this context but directional beaming at angles larger than 45° has not been achieved. We design and demonstrate nanoslits in a gold film flanked by corrugations, which give rise to beaming angles ranging from 45° to 60°. While the previous designs are based on achieving constructive interference at the aimed beaming angle, our approach complements such constructive interference with destructive interference at 0° and, as a result, enhances the directional beaming effect at angles larger than 45°. The structures are fabricated by electron beam lithography with two consecutive lift-off processes. The experimental far-field intensity distributions agree well with the designs.

