Apparatus for electrically detected electron nuclear double resonance in solid state electronic devices.

Area of Science:

• Physics
• Materials Science
• Spectroscopy

Background:

• Electron nuclear double resonance (ENDOR) spectroscopy is a powerful technique for probing local magnetic fields.
• Deep level centers in semiconductors can significantly impact device performance.
• Characterizing these centers requires sensitive and precise measurement techniques.

Purpose of the Study:

• To develop a novel ENDOR spectrometer utilizing electrical detection.
• To demonstrate the capability of this new spectrometer for characterizing ¹⁴N interactions.
• To investigate deep level centers in bipolar junction transistors (BJTs) at room temperature.

Main Methods:

• Development of a sensitive ENDOR spectrometer with electrical detection.
• Utilizing electrically detected magnetic resonance (EDMR) for signal acquisition.
• Performing measurements on fully processed BJTs at room temperature.

Main Results:

• The developed spectrometer provides reasonably high signal-to-noise ratio (SNR) spectra.
• ¹⁴N interactions with deep level centers were successfully observed.
• Spectra were obtained from BJTs at room temperature, demonstrating operational capability.

Conclusions:

• The novel EDMR-based ENDOR spectrometer is effective for sensitive measurements.
• This technique allows for the characterization of ¹⁴N interactions in semiconductor devices.
• The findings enable room-temperature investigation of deep level centers in BJTs.