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Plasma-assisted Molecular Beam Epitaxy of N-polar InAlN-barrier High-electron-mobility Transistors
Published on: November 24, 2016
Boron Nitride as a Passivation Capping Layer for AlGaN/GaN High Electron Mobility Transistors.
Gun Hee Lee1, Ah Hyun Park2, Jin Hong Lim1
1School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center, Chonbuk National University, Jeonju 54899, South Korea.
Hexagonal boron nitride (h-BN) enhances AlGaN/GaN high-electron mobility transistors (HEMTs) by reducing leakage current and improving performance. This passivation layer shows promise for advanced high-power electronics.
Area of Science:
- Materials Science
- Electrical Engineering
- Semiconductor Physics
Background:
- High-electron mobility transistors (HEMTs) are crucial for high-power applications.
- Passivation layers are essential for device stability and performance.
- AlGaN/GaN HEMTs face challenges with surface states and leakage currents.
Purpose of the Study:
- To investigate the effectiveness of hexagonal boron nitride (h-BN) as a passivation capping layer for AlGaN/GaN HEMTs.
- To analyze the impact of h-BN on the electrical characteristics of HEMTs.
- To evaluate the potential of h-BN for high-power electronic devices.
Main Methods:
- Fabrication of AlGaN/GaN HEMTs with and without h-BN passivation.
- Electrical characterization of the HEMTs, including current-voltage measurements.
- Analysis of gate leakage current, current drainage, extrinsic transconductance, and pulse response.
Main Results:
- HEMTs with h-BN passivation exhibited increased current drainage compared to unpassivated devices.
- A significant 10^3-fold reduction in gate leakage current was observed with h-BN.
- Improved extrinsic transconductance and pulse response due to reduced surface charge-trapping effects.
Conclusions:
- Hexagonal boron nitride (h-BN) serves as an effective passivation capping layer for AlGaN/GaN HEMTs.
- h-BN passivation significantly enhances device performance by mitigating leakage and improving charge dynamics.
- The findings support the use of h-BN in the development of next-generation high-power electronic devices.
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