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Proportional Microvalve Using a Unimorph Piezoelectric Microactuator.
Arun Gunda1, Gürhan Özkayar1, Marcel Tichem1
1Department of Precision and Microsystems Engineering, Delft University of Technology, 2628 CD Delft, The Netherlands.
Micromachines
|January 30, 2020
Summary
This study introduces a compact, low-power piezoelectric microvalve for microfluidic systems. It offers precise flow control and minimal leakage, addressing limitations of current technologies.
Area of Science:
- Microfluidics
- Mechanical Engineering
- Materials Science
Background:
- Polydimethylsiloxane (PDMS)-based pneumatic microvalves are common but bulky.
- Silicon-based microvalves often consume high power or are large.
- Existing microvalves struggle with portability and power efficiency in microfluidic applications.
Purpose of the Study:
- To develop a low-power, normally-open piezoelectric microvalve.
- To achieve a small form-factor for enhanced portability.
- To enable precise flow control in microfluidic devices.
Main Methods:
- Utilized rapid prototyping techniques including stereolithography and laser-cutting.
- Fabricated a piezoelectric microactuator with a novel design.
- Integrated the microactuator into a microvalve for flow control.
Main Results:
- Achieved a maximum piezoelectric microactuator displacement of 8.5 at 150.
- Demonstrated a microvalve flow range of 0-90 at 1 inlet pressure.
- Observed a leakage of 0.8 open-flow when closed, with a power consumption of 37.5.
Conclusions:
- The developed piezoelectric microvalve is a compact and low-power solution for microfluidic applications.
- The novel combination of rapid prototyping methods enabled efficient device fabrication.
- This microvalve offers a promising alternative to existing bulky and power-hungry microfluidic flow-control devices.
