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High-Precision Acceleration Measurement System Based on Tunnel Magneto-Resistance Effect
Lu Gao1, Fang Chen2, Yingfei Yao1
1School of Electronic and Information Engineering, Soochow University, Suzhou 215006, China.
Sensors (Basel, Switzerland)
|February 23, 2020
Summary
This study presents a high-precision acceleration measurement system using a tunnel magneto-resistance (TMR) sensor. A novel "force-magnetic-electric" coupling structure enhances sensitivity and achieves a resolution of 19 μg/√Hz.
Area of Science:
- MEMS and Nanosensors
- Sensor Technology
- Instrumentation
Background:
- Accurate acceleration measurement is critical for various applications.
- Existing systems face limitations in precision and noise reduction.
- Tunnel Magneto-Resistance (TMR) sensors offer high sensitivity for detecting small physical changes.
Purpose of the Study:
- To develop a high-precision acceleration measurement system.
- To convert acceleration into a measurable magnetic field change using a novel coupling structure.
- To enhance system sensitivity and reduce noise for improved measurement resolution.
Main Methods:
- Design of a "force-magnetic-electric" coupling structure integrating a micro-cantilever with a magnetic field source.
- Utilizing an ultra-sensitive TMR sensor in a Wheatstone bridge configuration.
- Development of a low-noise differential circuit and investigation of noise sources.
Main Results:
- Achieved a measurement resolution of 19 μg/√Hz at 1 Hz.
- Demonstrated a scale factor of 191 mV/g within ± 2 g range.
- Identified low-frequency 1/f noise as the dominant noise source.
Conclusions:
- The proposed system demonstrates high precision acceleration measurement capabilities.
- A high-frequency modulation technique effectively suppresses 1/f noise.
- Theoretical resolution improvement to 2.2 μg/√Hz is achievable with modulation.
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