Related Experiment Video
Updated: Dec 27, 2025
05:57
Author Spotlight: Microfluidic Channel-Based Soft Electrodes and Their Application in Capacitive Pressure Sensing
Published on: March 17, 2023
3.8K
Experimental Characterization of an Embossed Capacitive Micromachined Ultrasonic Transducer Cell
Yuanyu Yu1,2, Jiujiang Wang1,2, Xin Liu2,3
1Data Recovery Key Laboratory of Sichuan Province, College of Computer Science and AI, Neijiang Normal University, Neijiang 641100, China.
Micromachines
|February 26, 2020
Summary
An embossed annular pattern on Capacitive Micromachined Ultrasonic Transducers (CMUTs) significantly boosts output pressure by 27.1%. This enhancement is crucial for medical diagnosis and therapy, optimizing CMUT performance in collapse mode.
Area of Science:
- MEMS Technology
- Ultrasonic Transducers
- Biomedical Engineering
Background:
- Capacitive Micromachined Ultrasonic Transducers (CMUTs) are vital for medical applications requiring high output pressure.
- Existing CMUT designs face limitations in achieving maximum output pressure.
Purpose of the Study:
- To investigate the performance enhancement of CMUTs using an annular embossed pattern on the membrane.
- To evaluate the impact of the embossed pattern on CMUT output pressure and operational characteristics.
Main Methods:
- Fabrication of both embossed and uniform membrane CMUT cells using a six-mask sacrificial release process.
- Incorporation of a 3 μm × 2 μm annular nickel pattern on the CMUT membrane.
- Experimental characterization using optical, electrical, and acoustic instruments.
Main Results:
- The embossed CMUT cell demonstrated a 27.1% improvement in output pressure compared to uniform CMUT cells.
- Fractional bandwidths were improved from 41.8% (uniform) to 52.5% (embossed).
- Optimal performance was achieved when the embossed pattern was centered on the membrane.
Conclusions:
- The annular embossed pattern significantly enhances CMUT output pressure and operational performance, particularly in collapse mode.
- Strategic placement of the embossed pattern at the membrane's vibrating center is key for maximizing output pressure.
- Embossed CMUTs offer superior performance for demanding medical diagnostic and therapeutic applications.
