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Miniaturized 0.13-μm CMOS Front-End Analog for AlN PMUT Arrays.

Iván Zamora1, Eyglis Ledesma1, Arantxa Uranga1

  • 1Departament d'Enginyeria Electrònica, Universitat Autónoma de Barcelona, 08193 Bellaterra, Spain.

Sensors (Basel, Switzerland)
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Summary

This study introduces a novel analog front-end transceiver for ultrasound imaging, integrating a high-voltage transmitter and low-noise amplifier with CMOS-AlN-PMUTs. The system offers superior power, noise, and area performance compared to existing ASICs.

Keywords:
CMOSMEMSPMUThigh-voltage (HV) transmitterlow-voltage receiver (RX) amplifiermonolithical integrationultrasoundultrasound application-specific integrated circuit (ASIC)

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Area of Science:

  • Electrical Engineering
  • Biomedical Engineering
  • Materials Science

Background:

  • Ultrasound imaging systems require efficient analog front-end transceivers for signal generation and reception.
  • Piezoelectric micromachined ultrasonic transducers (PMUTs) offer miniaturization and integration potential for ultrasound applications.
  • Existing front-end integrated circuits often face challenges in power consumption, noise performance, and physical footprint.

Purpose of the Study:

  • To present a novel analog front-end transceiver for ultrasound imaging systems.
  • To integrate a high-voltage transmitter, low-noise amplifier, and CMOS-AlN-PMUTs on a single platform.
  • To compare the performance of voltage amplifier (VA) and charge-sensitive amplifier (CSA) front-ends.

Main Methods:

  • Design and fabrication of an analog front-end transceiver using a 0.13-μm Silterra CMOS process and MEMS-on-CMOS platform.
  • Integration of aluminum nitride (AlN) PMUTs with CMOS circuitry.
  • Excitation of PMUTs with 32 V for acoustic pressure generation and reception of echo signals.
  • Comparative electrical and acoustic performance analysis of VA and CSA front-end configurations.

Main Results:

  • Successful demonstration of the functionality of the designed low-power analog front-end circuitry.
  • Achieved superior performance in power consumption, noise, and area compared to a state-of-the-art application-specific integrated circuit (ASIC).
  • Validated the effectiveness of the CMOS-AlN-PMUT integration for ultrasound imaging applications.

Conclusions:

  • The developed analog front-end transceiver with integrated CMOS-AlN-PMUTs represents a significant advancement in ultrasound imaging technology.
  • The system's enhanced performance metrics offer potential for more compact, power-efficient, and high-fidelity ultrasound devices.
  • The comparative analysis provides valuable insights for future design optimization of ultrasound front-end circuitry.