Development and control of a hybrid active mount module for precision stages.

Area of Science:

• Mechanical Engineering
• Control Systems Engineering
• Materials Science

Background:

• Precision stages are critical for high-productivity industrial applications, demanding higher speed, size, and precision.
• High-performance positioning is a challenging technology where vibration significantly degrades system accuracy.
• Controlling vibrations is essential for achieving the required precision in positioning systems.

Purpose of the Study:

• To propose a novel hybrid active mount module for precision stages.
• To address and mitigate various sources of vibration affecting precision stage performance.
• To improve overall stage accuracy, speed, and reduce settling time.

Main Methods:

• Development of a hybrid active mount module integrating active and passive vibration isolation.
• Implementation of vibration reduction strategies for base floor vibrations.
• Minimization of vibrations generated by the precision stage's driving linear motors.
• Compensation for nonlinearities in passive mounts to reduce settling time.

Main Results:

• Experimental validation of the developed hybrid active mount module prototype.
• Demonstrated reduction in base vibrations and motor-induced vibrations.
• Significant improvement in precision stage settling time and positioning accuracy.
• Confirmation of the module's potential to enhance overall stage performance.

Conclusions:

• The developed hybrid active mount module effectively controls multiple vibration sources in precision stages.
• The system shows significant potential for improving productivity and product quality in industrial settings.
• This technology offers a viable solution for achieving higher precision positioning in demanding applications.