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Updated: Dec 26, 2025

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating

Published on: October 11, 2016

X-ray optics and beam characterization using random modulation: theory.

Sebastien Berujon¹, Ruxandra Cojocaru¹, Pierre Piault¹

¹European Synchrotron Radiation Facility, CS 40220, F-38043 Grenoble Cedex 9, France.

Journal of Synchrotron Radiation

|March 11, 2020

Summary

This summary is machine-generated.

X-ray near-field speckle-based phase-sensing offers efficient optical element characterization. This review generalizes speckle methods for at-wavelength metrology, enabling selection of optimal approaches for diverse scenarios.

Keywords:

at-wavelength metrology metrology near-field speckle-based phase-sensing optics speckle

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Area of Science:

Optics and Photonics
X-ray Science
Metrology

Background:

Optical elements require precise characterization for advanced applications.
X-ray near-field speckle-based phase-sensing is an emerging technique for metrology.

Purpose of the Study:

To provide a theoretical review of X-ray near-field speckle-based phase-sensing methods.
To generalize speckle-based phase-sensing concepts for optical characterization.
To guide the selection of appropriate metrology approaches.

Main Methods:

Theoretical review of speckle-based phase-sensing techniques.
Generalization of speckle-based phase-sensing principles.
Analysis of processing methods for metrology applications.

Main Results:

A theoretical framework for several speckle-based phase-sensing methods is presented.
The generalization applies to various beams, optics, and metrology situations.
Understanding processing method differences is key to selecting optimal approaches.

Conclusions:

Speckle-based phase-sensing is a versatile tool for optical characterization.
The generalized framework supports at-wavelength metrology applications.
Method selection is crucial for successful metrology implementation.