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Quantum Tunneling Hygrometer with Temperature Stabilized Nanometer Gap.

A Banerjee1, R Likhite1, H Kim1

  • 1University of Utah, 201 Presidents Cir, Salt Lake City, UT, 84112, United States of America.

Scientific Reports
|March 12, 2020
PubMed
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This study introduces a novel humidity sensor utilizing electrical tunneling across nanometer gaps. It achieves a large resistance change with minimal power, unaffected by temperature variations.

Area of Science:

  • Materials Science
  • Nanotechnology
  • Sensor Technology

Background:

  • Humidity sensors are crucial for environmental monitoring and industrial processes.
  • Existing sensors often suffer from temperature sensitivity and high power consumption.
  • Developing stable, low-power humidity sensors is an ongoing challenge.

Purpose of the Study:

  • To design and fabricate a novel humidity sensor.
  • To investigate the sensor's response to humidity changes.
  • To ensure temperature stability and low power consumption.

Main Methods:

  • Fabrication of a sensor with stacked metal electrodes separated by a nanometer air gap.
  • Utilizing polyimide patches with differential swelling characteristics for humidity detection.

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  • Employing a water-vapor diffusion barrier (Al2O3) for temperature stabilization.
  • Measuring electrical tunneling current response to humidity variations.

    • Main Results:

    • The sensor demonstrated an unassisted reversible resistance change of approximately 10^5 (Rmax/Rmin) over a 20-90% relative humidity range.
    • Standby DC power consumption was remarkably low, around 0.4 pW.
    • Temperature fluctuations (25-60°C at 24% RH) caused negligible resistance change (0.0025% of full range).

    Conclusions:

    • The developed humidity sensor offers high sensitivity and stability.
    • Its temperature-insensitivity and ultra-low power consumption make it suitable for various applications.
    • This design represents a significant advancement in humidity sensing technology.