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Design and fabrication of an InGaAs focal plane array integrated with linear-array polarization grating
Optics Letters
|March 13, 2020
Summary
A new near-infrared polarization imaging detector using InGaAs technology was developed. It achieves high performance, including excellent transmittance and extinction ratio, for advanced remote sensing and material classification applications.
Area of Science:
- Photonics and optical engineering.
- Semiconductor device fabrication.
- Infrared imaging technology.
Background:
- Polarization imaging is vital for remote sensing, material classification, and reconnaissance.
- Existing near-infrared polarization imaging systems require improved detector performance.
Purpose of the Study:
- To propose and fabricate a novel InGaAs focal plane array integrated with a linear-array polarization grating.
- To accurately evaluate the polarization performance of the fabricated near-infrared detector.
Main Methods:
- Fabrication of an InGaAs focal plane array with integrated linear-array polarization grating.
- Utilizing an improved test system to measure detector transmittance and extinction ratio (ER).
- Characterization of detectivity and operable pixel factor.
Main Results:
- Achieved a detectivity of 1.06 × 1012 cm·Hz1/2/W.
- Operable pixel factor exceeds 99.8%.
- Transmittance is greater than 55%, and extinction ratio (ER) is greater than 21:1.
Conclusions:
- The fabricated InGaAs detector demonstrates excellent capability for near-infrared polarization imaging.
- The developed detector meets practical needs for advanced photonic applications.
- High performance metrics indicate suitability for demanding imaging tasks.
