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Ultra Sensitivity Silicon-Based Photonic Crystal Microcavity Biosensors for Plasma Protein Detection in Patients with
Chun-Ju Yang1, Hai Yan1, Naimei Tang2
1Microelectronics Research Center, Electrical and Computer Engineering Department, University of Texas at Austin, Austin, TX 78758, USA.
Abstract:
Defect-engineered photonic crystal (PC) microcavities were fabricated by UV photolithography and their corresponding sensitivities to biomarkers in patient plasma samples were compared for different resonant microcavity characteristics of quality factor Q and biomarker fill fraction. Three different biomarkers in plasma from pancreatic cancer patients were experimentally detected by conventional L13 defect-engineered microcavities without nanoholes and higher sensitivity L13 PC microcavities with nanoholes. 8.8 femto-molar (0.334 pg/mL) concentration of pancreatic cancer biomarker in patient plasma samples was experimentally detected which are 50 times dilution than ELISA in a PC microcavity with high quality factor and high analyte fill fraction.
