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Spin Coating and Micro-Patterning Optimization of Composite Thin Films Based on PVDF.

Anh Ngoc Nguyen1,2, Jeanne Solard3, Huyen Thi Thanh Nong1,4

  • 1Laboratoire de Sciences des Procédés et des Matériaux (LSPM-CNRS UPR-3407), Université Sorbonne Paris Nord (USPN), 93430 Villetaneuse, France.

Materials (Basel, Switzerland)
|March 20, 2020
PubMed
Summary

We optimized thin poly(vinylidene fluoride) (PVDF) films using spin coating for industrial applications. This method achieved smooth, 90 nm films with controlled properties and enabled micro-patterning for polymer devices.

Keywords:
PVDFcomposite thin filmsmagnetic nanoparticlesspin coating

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Area of Science:

  • Materials Science
  • Polymer Science
  • Nanotechnology

Background:

  • Poly(vinylidene fluoride) (PVDF) is a versatile polymer with significant potential in various electronic and sensor applications.
  • Developing thin films with controlled properties is crucial for advanced device fabrication.
  • Scalable manufacturing techniques are needed to transition laboratory findings to industrial production.

Purpose of the Study:

  • To optimize the spin coating process for producing highly controlled, ultra-thin PVDF films.
  • To investigate the relationship between film properties (thickness, roughness, nano-inclusions) and electro-active, magnetic, and structural characteristics.
  • To demonstrate the feasibility of micro-patterning these PVDF films using established silicon fabrication technologies.

Main Methods:

  • Spin coating technique was employed to deposit PVDF thin films.
  • Process parameters including solution concentration, viscosity, spin rate, and substrate temperature were systematically adjusted.
  • Characterization of film properties and analysis of electro-active phase, magnetic, and structural aspects were performed.
  • Micro-patterning was achieved using optical lithography and plasma etching.

Main Results:

  • Continuous and smooth PVDF thin films with an average thickness of 90 nm were successfully fabricated.
  • Control over film thickness, roughness, and nano-inclusion content was achieved by optimizing spin coating parameters.
  • The relationship between the electro-active phase content and the magnetic/structural properties of the composite films was established.
  • Well-defined 1D micro-stripes and squared-rings were successfully patterned, showcasing the transferability of silicon technology.

Conclusions:

  • The spin coating technique is a viable and industrially scalable method for producing high-quality, ultra-thin PVDF films.
  • Optimized PVDF films exhibit controllable properties suitable for advanced applications.
  • The demonstrated micro-patterning capability opens avenues for creating novel polymer-based microelectronic devices.