Real-time Lissajous imaging with a low-voltage 2-axis MEMS scanner based on electrothermal actuation

Area of Science:

• Biomedical Engineering
• Micro-Electro-Mechanical Systems (MEMS)

Background:

• Micro-Electro-Mechanical Systems (MEMS) scanners are vital for biomedical endoscopic imaging, including confocal microscopy and Optical Coherence Tomography (OCT).
• High-speed operation and low actuation voltage are critical requirements for these scanners in medical applications.

Purpose of the Study:

• To report a 2-axis MEMS electrothermal micro-scanner designed for high frame rate and large field-of-view endoscopic imaging.
• To optimize Lissajous scan parameters for enhanced image quality within scanner and OCT system limitations.

Main Methods:

• Development of a 2-axis MEMS electrothermal micro-scanner.
• Implementation of Lissajous scanning patterns tailored to scanner capabilities and OCT system sampling rates.
• Experimental validation of imaging performance.

Main Results:

• Achieved imaging frame rates from 10 to 80 frames per second.
• Demonstrated image acquisition of 233 px × 203 px at 10 fps and 53 px × 53 px at 61 fps.
• Confirmed the potential for high-definition and high frame rate endoscopic Lissajous imaging.

Conclusions:

• The developed MEMS micro-scanner effectively supports high-definition and high frame rate endoscopic Lissajous imaging.
• This technology shows significant promise for advancing real-time biomedical imaging modalities like OCT.