Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching.

Sensors (Basel, Switzerland)·2025
Same author

Fabrication of Buried Microchannels with Almost Circular Cross-Section Using HNA Wet Etching.

Micromachines·2024
Same author

Additive manufacturing of hollow connected networks for solar photo-Fenton-like catalysis.

RSC sustainability·2024
Same author

Flow-Independent Thermal Conductivity and Volumetric Heat Capacity Measurement of Pure Gases and Binary Gas Mixtures Using a Single Heated Wire.

Micromachines·2024
Same author

Compact Micro-Coriolis Mass-Flow Meter with Optical Readout.

Micromachines·2024
Same author

Flow Ripple Reduction in Reciprocating Pumps by Multi-Phase Rectification.

Sensors (Basel, Switzerland)·2023

Related Experiment Video

Updated: Dec 25, 2025

Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor
07:28

Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor

Published on: August 30, 2012

11.1K

A Flow-Through Microfluidic Relative Permittivity Sensor.

Yaxiang Zeng1, Remco Sanders1, Remco Wiegerink1

  • 1Integrated Devices and Systems group, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.

Micromachines
|April 5, 2020
PubMed
Summary

We developed a microfluidic sensor using silicon on insulator (SOI) technology to measure fluid relative permittivity. This sensor demonstrates linear performance for dielectric materials ranging from 1 to 41.

Keywords:
capacitance sensorinterdigitated electrodesrelative permittivity sensor

More Related Videos

Thermal Measurement Techniques in Analytical Microfluidic Devices
08:29

Thermal Measurement Techniques in Analytical Microfluidic Devices

Published on: June 3, 2015

10.0K
Dry Film Photoresist-based Electrochemical Microfluidic Biosensor Platform: Device Fabrication, On-chip Assay Preparation, and System Operation
13:42

Dry Film Photoresist-based Electrochemical Microfluidic Biosensor Platform: Device Fabrication, On-chip Assay Preparation, and System Operation

Published on: September 19, 2017

12.3K

Related Experiment Videos

Last Updated: Dec 25, 2025

Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor
07:28

Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor

Published on: August 30, 2012

11.1K
Thermal Measurement Techniques in Analytical Microfluidic Devices
08:29

Thermal Measurement Techniques in Analytical Microfluidic Devices

Published on: June 3, 2015

10.0K
Dry Film Photoresist-based Electrochemical Microfluidic Biosensor Platform: Device Fabrication, On-chip Assay Preparation, and System Operation
13:42

Dry Film Photoresist-based Electrochemical Microfluidic Biosensor Platform: Device Fabrication, On-chip Assay Preparation, and System Operation

Published on: September 19, 2017

12.3K

Area of Science:

  • Microfluidics
  • Sensor Technology
  • Dielectric Materials

Background:

  • Microfluidic devices offer precise fluid handling for various applications.
  • Relative permittivity is a key property for characterizing dielectric materials.
  • Integrated sensors require robust and miniaturized sensing elements.

Purpose of the Study:

  • To design, simulate, fabricate, and characterize a novel microfluidic sensor for relative permittivity measurement.
  • To utilize silicon on insulator (SOI) wafer technology for sensor fabrication.
  • To assess the sensor's performance with non-conducting fluids over a wide dielectric range.

Main Methods:

  • Fabrication of a microfluidic channel and interdigitated electrodes on an SOI wafer.
  • Integration of fluidic inlets and outlets etched through the wafer's handle layer.
  • Impedance analysis using an impedance analyzer to measure dielectric properties of fluids.

Main Results:

  • Successful fabrication of the microfluidic relative permittivity sensor.
  • Demonstrated good linearity in sensor response for relative permittivity values from 1 to 41.
  • Characterization of non-conducting fluids based on their dielectric properties.

Conclusions:

  • The developed microfluidic sensor effectively measures relative permittivity with high linearity.
  • The sensor's design based on SOI technology is suitable for integration into multiparameter microfluidic systems.
  • This technology holds potential for advanced fluid analysis and sensing applications.